Publication | Closed Access
In situ tensile strength measurement and Weibull analysis of thick film and thin film micromachined polysilicon structures
119
Citations
5
References
1997
Year
Materials ScienceEngineeringMechanical BehaviorMicrofabricationStrength PropertyMechanical EngineeringStressstrain AnalysisSolid MechanicsMicrostructure-strength RelationshipMechanical PerformanceThick FilmWeibull AnalysisMechanics Of MaterialsMicrostructure
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