Effects of boron incorporation on the structural, optical and electrical properties of sol–gel-derived ZrO2 gate dielectrics

High-κ gate dielectrics: Current status and materials properties considerations

G. D. Wilk, Robert M. Wallace, J. Anthony · Journal of Applied Physics · 2001 · 5.9K citations

Engineering, Materials Engineering, Materials Science +17

Trap-assisted tunneling in high permittivity gate dielectric stacks

Michel Houssa, M. Tuominen, M. Naili et al. · Journal of Applied Physics · 2000 · 353 citations

Engineering, Electrical Engineering, Materials Science +17

Photoemission study of energy-band alignments and gap-state density distributions for high-<i>k</i> gate dielectrics

Seiichi Miyazaki · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 329 citations

Natural Sciences, Materials Science, Physics +17

Effects of crystallization on the electrical properties of ultrathin HfO2 dielectrics grown by atomic layer deposition

Hyoungsub Kim, Paul C. McIntyre, Krishna C. Saraswat · Applied Physics Letters · 2003 · 228 citations

Natural Sciences, Materials Engineering, Materials Science +17

Behavior of hydrogen in high dielectric constant oxide gate insulators

P. W. Peacock, John Robertson · Applied Physics Letters · 2003 · 196 citations

Natural Sciences, Materials Engineering, Materials Science +17