Tela Innovations (United States)

Low k 1 logic design using gridded design rules

Michael C. Smayling, Huayu Liu, Lynn Cai · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 55 citations

Engineering, Electronic Design Automation, Computer Architecture +16

E-beam to complement optical lithography for 1D layouts

David Lam, Enden D. Liu, Michael C. Smayling et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 34 citations · Full text

APF pitch-halving for 22nm logic cells using gridded design rules

Michael C. Smayling, Christopher Bencher, Hao D. Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 30 citations

Electrical Engineering, Physical Design (Electronics), Engineering +11

32nm and below logic patterning using optimized illumination and double patterning

Michael C. Smayling, Valery Axelrad · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 26 citations

Engineering, Electronic Design Automation, Computer Architecture +20

Interference assisted lithography for patterning of 1D gridded design

Robert T. Greenway, Rudolf Hendel, Kwangok Jeong et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 23 citations

Sram Bitcell, Electrical Engineering, Physical Design (Electronics) +14