2
Publications
38
Citations
2
H-Index
2008
Active since
Affiliations
University of California San Diego(Current)
Robert T. Greenway is an author at University of California San Diego specializing in microelectronics, electrical engineering, and microfabrication.
Top concepts
EngineeringMicroelectronicsMicrofabricationElectrical Engineering3D PrintingVlsi DesignApplied PhysicsComputer EngineeringComputer ArchitectureComputer-aided Design
Publications per year
2008–2009
2
2
Interference assisted lithography for patterning of 1D gridded design
Robert T. Greenway, Rudolf Hendel, Kwangok Jeong et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 23 citations
Sram Bitcell, Electrical Engineering, Physical Design (Electronics) +14
32nm 1-D regular pitch SRAM bitcell design for interference-assisted lithography
Robert T. Greenway, Kwangok Jeong, Andrew B. Kahng et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 15 citations
Electrical Engineering, Physical Design (Electronics), Engineering +13
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