Concepedia

Koichiro Tsujita

KT

3

Publications

38

Citations

3

H-Index

2012

Active since

Affiliations

Sequoia (United States)(Current)

Tokyo Electron (Japan)

Tela Innovations (United States)

Koichiro Tsujita is an author at Sequoia (United States) specializing in microelectronics, microfabrication, and engineering.

Top concepts

EngineeringMicroelectronicsMicrofabricationComputer EngineeringComputer-aided DesignDesignVlsi DesignOptoelectronicsComputer ArchitectureElectrical Engineering

Publications per year

2012–2013

3

Publications

3

Sub-12nm optical lithography with 4x pitch division and SMO-lite

Michael C. Smayling, Koichiro Tsujita, Hidetami Yaegashi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 16 citations

Optical Materials, Engineering, Vlsi Design +23

Improvement of lithographic performance and reduction of mask cost by simple OPC

Koichiro Tsujita, Koji Mikami, Hiroyuki Ishii et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 11 citations

Engineering, Electron-beam Lithography, Optic Design +18

Sub-20nm logic lithography optimization with simple OPC and multiple pitch division

Michael C. Smayling, Valery Axelrad, Koichiro Tsujita et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 11 citations

Engineering, Vlsi Design, Electron-beam Lithography +23

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