Concepedia

Author

Hidetami Yaegashi

Tokyo Electron (Japan)

Also Known As

H. Yaegashi, Hidetami Yaegashi

74

Publications

442

Citations

12

H-Index

48

Concepts

All Affiliations

Tokyo Electron (Japan)Sequoia (United States)Canon (Japan)Tela Innovations (United States)
HY

About

Hidetami Yaegashi is an author at Tokyo Electron (Japan) specializing in engineering, microelectronics, and microfabrication.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

12

15

279

2

Applied Physics

10

11

199

3

Natural Sciences

1

1

24

4

Chemical Engineering

1

1

42

5

Chemistry

1

1

42

Hidetami Yaegashi

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17

Publications

307

Citations

12

H-Index

YearCitations

Page 1