Concepedia

Masato Kushibiki

MK

2

Publications

31

Citations

2

H-Index

2010

Active since

Affiliations

Tokyo Electron (Japan)(Current)

Masato Kushibiki is an author at Tokyo Electron (Japan) specializing in microfabrication, parallel computing, and engineering.

Top concepts

EngineeringMicroelectronicsMicrofabricationParallel ComputingComputer EngineeringComputer Architecture3D PrintingVlsi DesignApplied PhysicsSystems Engineering

Publications per year

2010–2010

2

Publications

2

The important challenge to extend spacer DP process towards 22nm and beyond

Kenichi Oyama, Eiichi Nishimura, Masato Kushibiki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 16 citations

Engineering, Microfabrication, Important Challenge +12

Advanced self-aligned DP process development for 22-nm node and beyond

Arisa Hara, Eiichi Nishimura, Masato Kushibiki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 15 citations

Numerical Aperture, Engineering, Vlsi Design +18

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