Concepedia

Shot Count Optimization

Shot Count Optimization is a methodological framework in computational imaging science that systematically determines the minimal number of electron or photon exposures required to achieve a desired resolution or signal-to-noise ratio in mask design, thereby balancing fabrication efficiency and patterning fidelity.

17

Publications

276

Citations

92

Authors

24

Institutions

Publications per year

2017–2026

0

Parents

Publications

17

Throughput Optimization for SADP and E-beam based Manufacturing of 1D Layout

Yixiao Ding, Chris Chu, Wai-Kei Mak · 2014 · 39 citations

, , +9

Yield- and cost-driven fracturing for variable shaped-beam mask writing

Andrew B. Kahng, Xu Xu, Alex Zelikovsky · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 23 citations

, , +16

CP element based design for 14nm node EBDW high volume manufacturing

Takashi Maruyama, Yasuhide Machida, Shinji Sugatani et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 19 citations

, , +11

OPC simplification and mask cost reduction using regular design fabrics

Tejas Jhaveri, Ian Stobert, Lars W. Liebmann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 18 citations

, , +10

Maskless lithography: estimation of the number of shots for each layer in a logic device with character-projection-type low-energy electron-beam direct writing system

Ryoichi Inanami, Shunko Magoshi, Shouhei Kousai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 18 citations

, , +11

1–5 of 17

Authors

92

  1. IB
    Ingo Bork

    Siemens (United States), United States

    3 publications · 46 citations

    3

    h-index

  2. RI
    Ryoichi Inanami

    Toshiba (Japan), Japan

    3 publications · 44 citations

    3

    h-index

  3. AF
    Aki Fujimura

    JEOL (Japan), Japan

    3 publications · 49 citations

    3

    h-index

  4. YM
    Yusuke Matsunaga

    Fujitsu (Japan), Japan

    2 publications · 26 citations

    2

    h-index

  5. TK
    Tadashi Komagata

    JEOL (Japan), Japan

    2 publications · 31 citations

    2

    h-index

1–5 of 92

Institutions

24

  1. The University of Tokyo

    Tokyo, Japan

    3 h-index

    7 publications

    113 citations

  2. Mentor Technologies

    Tulsa, United States

    3 h-index

    13 publications

    134 citations

  3. Institute of Systems, Information Technologies and Nanotechnologies

    Fukuoka, Japan

    2 h-index

    3 publications

    37 citations

  4. Tokyo Electron (Japan)

    Tokyo, Japan

    2 h-index

    4 publications

    52 citations

  5. JEOL (Japan)

    Tokyo, Japan

    2 h-index

    5 publications

    78 citations

  6. Kyushu University

    Fukuoka, Japan

    2 h-index

    7 publications

    93 citations

  7. Toshiba (Japan)

    Tokyo, Japan

    2 h-index

    8 publications

    138 citations

  8. Carnegie Mellon University

    Pittsburgh, United States

    1 h-index

    4 publications

    72 citations

1–8 of 24

Venues

  1. 11

    h-index

  2. 1

    h-index

  4. Journal of Chemical Theory and Computation

    JCTC · 1 publications · 13 citations

1–4