Tadashi Komagata

Improvement of mask write time for curvilinear assist features at 22nm

Aki Fujimura, Ingo Bork, Taiichi Kiuchi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 16 citations

Engineering, Vlsi Design, Mask Write Time +17

Writing wavy metal 1 shapes on 22-nm logic wafers with less shot count

Harold Zable, Aki Fujimura, Tadashi Komagata et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 15 citations

Wavy Metal 1, Engineering, Nm Logic Node +19

Efficiently writing circular contacts on production reticle

Aki Fujimura, Christophe Pierrat, Taiichi Kiuchi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 11 citations

Engineering, Electron-beam Lithography, Target Fabrication +19

Best depth of focus on 22-nm logic wafers with less shot count

Aki Fujimura, David Kim, Tadashi Komagata et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 10 citations