Concepedia
Statistics
Publications
6
Citations
104
H-Index
Active since
2002
Affiliations
Toshiba (Japan)(Current)
The University of Tokyo
Institute of Systems, Information Technologies and Nanotechnologies
Tokyo Electron (Japan)
Kyushu University
Ryoichi Inanami is an author at Toshiba (Japan) specializing in engineering, throughput improvement, and electrical engineering.
Publications per year
2002–2012
Throughput enhancement strategy of maskless electron beam direct writing for logic device
Ryoichi Inanami, S. Magoshi, S. Kousai et al. · 2002 · 26 citations
Engineering, Computer Engineering, Electrical Engineering +17
Aberration budget in extreme ultraviolet lithography
Yumi Nakajima, Takashi Satō, Ryoichi Inanami et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 20 citations
Engineering, Electrical Engineering, Physics +13
Maskless lithography: estimation of the number of shots for each layer in a logic device with character-projection-type low-energy electron-beam direct writing system
Ryoichi Inanami, Shunko Magoshi, Shouhei Kousai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 18 citations
Engineering, Computer Engineering, Electrical Engineering +11
Technology mapping technique for throughput enhancement of character projection equipment
Makoto Sugihara, Taiga Takata, Kenta Nakamura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 15 citations
Engineering, Computer Engineering, Digital Fabrication +12
Sub-100 nm pattern formation by roll-to-roll nanoimprint
Ryoichi Inanami, Tomoko Ojima, Kazuto Matsuki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 14 citations
Engineering, Manufacturing Engineering, Materials Science +17
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