Concepedia
Statistics
Publications
1
Citations
20
H-Index
Active since
2008
Affiliations
Toshiba (Japan)(Current)
Yumi Nakajima is an author at Toshiba (Japan).
Publications per year
2008–2008
Aberration budget in extreme ultraviolet lithography
Yumi Nakajima, Takashi Satō, Ryoichi Inanami et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 20 citations
1–1 of 1