Concepedia

Overetching

Overetching is a thin film etching process in which material removal continues beyond the point required to completely remove the target layer, thereby risking unintended erosion of underlying layers or features due to excessive exposure to the etchant.

11

Publications

482

Citations

38

Authors

11

Institutions

Publications per year

2017–2026

1

Parents

Publications

11

On the origin of the notching effect during etching in uniform high density plasmas

Gyeong S. Hwang, Konstantinos P. Giapis · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 251 citations · Full text

, , +16

Effect of pH in Ru Slurry with Sodium Periodate on Ru CMP

In‐Kwon Kim, Byoung-Gwun Cho, Jin-Goo Park et al. · Journal of The Electrochemical Society · 2009 · 50 citations

, , +13

Reactive ion etching damage to GaAs layers with etch stops

C. M. Knoedler, L. Osterling, Hadas Shtrikman · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 47 citations

, , +17

Microfabrication and testing of suspended structures compatible with silicon-on-insulator technology

Arturo A. Ayón, K. Ishihara, Rebecca A. Braff et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 24 citations

, , +17

Damage studies of dry etched GaAs recessed gates for field effect transistors

S. Salimian, C.W.M. Yuen, C. Shih et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 23 citations

, , +17

1–5 of 11

Authors

38

  1. HA
    Hisahiro Ansai

    Sony (Taiwan), Taiwan

    2 publications · 34 citations

    2

    h-index

  2. TT
    Tetsuya Tatsumi

    The University of Osaka, Japan

    2 publications · 34 citations

    2

    h-index

  3. TK
    Takashi Kinoshita

    Chiba University, Japan

    2 publications · 34 citations

    2

    h-index

  4. SK
    Shöji Kobayashi

    Kagawa University, Japan

    2 publications · 34 citations

    2

    h-index

  5. NK
    Nobuyuki Kuboi

    Tokyo Electron (Japan), Japan

    2 publications · 34 citations

    2

    h-index

1–5 of 38

Institutions

11

  1. California Institute of Technology

    Pasadena, United States

    1 h-index

    2 publications

    502 citations

  2. National Yang Ming Chiao Tung University

    Hsinchu, Taiwan

    1 h-index

    2 publications

    26 citations

  3. SK Group (South Korea)

    Seoul, South Korea

    1 h-index

    3 publications

    150 citations

  4. National Synchrotron Radiation Research Center

    Hsinchu, Taiwan

    1 h-index

    1 publications

    13 citations

  5. Hanyang University

    Seoul, South Korea

    1 h-index

    3 publications

    150 citations

  6. Advanced Micro Devices (United States)

    Sunnyvale, United States

    1 h-index

    6 publications

    96 citations

  7. National Chi Nan University

    Puli, Taiwan

    1 h-index

    2 publications

    26 citations

  8. Varian Medical Systems (United States)

    Palo Alto, United States

    1 h-index

    4 publications

    92 citations

1–8 of 11

Venues

  1. 5

    h-index

  2. Applied Physics Express

    APEX · 1 publications · 17 citations

    1

    h-index

  3. Japanese Journal of Applied Physics

    JJAP · 1 publications · 17 citations

    1

    h-index

  4. IEEE Electron Device Letters

    1 publications · 16 citations

    1

    h-index

  5. Journal of The Electrochemical Society

    JES · 1 publications · 50 citations

    1

    h-index

1–5