Concepedia

Imprint Lithography Simulation

Imprint Lithography Simulation is a computational modeling approach used in nanofabrication research that numerically predicts the physical and mechanical behavior of resist materials and mold interactions during the nanoimprint lithography process to optimize pattern transfer fidelity.

40

Publications

1.1K

Citations

149

Authors

35

Institutions

Publications per year

2017–2026

2

Parents

Publications

40

Simulation and experimental study of polymer deformation in nanoimprint lithography

Yoshihiko Hirai, Takaaki Konishi, Takashi Yoshikawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 173 citations

, , +17

Study of the resist deformation in nanoimprint lithography

Yoshihiko Hirai, Masaki Fujiwara, Takahiro Okuno et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 145 citations

, , +17

Simulation of fluid flow in the step and flash imprint lithography process

Shravanthi Reddy, Roger T. Bonnecaze · Microelectronic Engineering · 2005 · 77 citations

, , +14

Simulations of nonuniform embossing: The effect of asymmetric neighbor cavities on polymer flow during nanoimprint lithography

Harry D. Rowland, William P. King, Amy Cha-Tien Sun et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 63 citations

, , +16

Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process

Ji-Hoon Kang, Kwang‐Seop Kim, Kyung-Woong Kim · Applied Surface Science · 2010 · 52 citations

, , +14

1–5 of 40

Authors

149

  1. YH
    Yoshihiko Hirai

    Osaka Prefecture University, Japan

    8 publications · 430 citations

    8

    h-index

  2. JM
    Jason Meiring

    The University of Texas at Austin, United States

    4 publications · 98 citations

    4

    h-index

  3. MY
    Masaaki Yasuda

    Osaka Prefecture University, Japan

    4 publications · 63 citations

    4

    h-index

  4. CG
    C. Grant Willson

    The University of Texas at Austin, United States

    4 publications · 114 citations

    4

    h-index

  5. HK
    Hiroaki Kawata

    Osaka Prefecture University, Japan

    4 publications · 63 citations

    4

    h-index

1–5 of 149

Institutions

35

  1. Osaka Prefecture University

    Sakai, Japan

    8 h-index

    35 publications

    1.7K citations

  2. The University of Texas at Austin

    Austin, United States

    7 h-index

    34 publications

    978 citations

  3. Motorola (United States)

    Schaumburg, United States

    3 h-index

    24 publications

    664 citations

  4. Korea Institute of Machinery & Materials

    Daejeon, South Korea

    3 h-index

    4 publications

    168 citations

  5. National Tsing Hua University

    Hsinchu, Taiwan

    2 h-index

    5 publications

    83 citations

  6. Korea Advanced Institute of Science and Technology

    Daejeon, South Korea

    2 h-index

    6 publications

    144 citations

  7. Louisiana State University

    Baton Rouge, United States

    2 h-index

    7 publications

    235 citations

  8. University of Science and Technology of China

    Hefei, China

    2 h-index

    10 publications

    126 citations

1–8 of 35

Venues

  1. Microelectronic Engineering

    6 publications · 148 citations

    6

    h-index

  2. 6

    h-index

  3. 5

    h-index

  4. Japanese Journal of Applied Physics

    JJAP · 3 publications · 51 citations

    3

    h-index

  5. 2

    h-index

1–5