Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process

Fast Parallel Algorithms for Short-Range Molecular Dynamics

Steven J. Plimpton · Journal of Computational Physics · 1995 · 44.6K citations

Computing, High-performance Computing, Physics +10

Development and Testing of the OPLS All-Atom Force Field on Conformational Energetics and Properties of Organic Liquids

William L. Jorgensen, David S. Maxwell, Julian Tirado‐Rives · Journal of the American Chemical Society · 1996 · 15.3K citations

Natural Sciences, Chemistry, Physics +17

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Nanoimprint lithography

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 1.7K citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Force fields for silicas and aluminophosphates based on<i>ab initio</i>calculations

B. W. H. van Beest, G. J. Kramer, Rutger A. van Santen · Physical Review Letters · 1990 · 1.5K citations · Full text

Natural Sciences, Chemistry, Materials Science +17