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Molecular dynamics study on the effects of stamp shape, adhesive energy, and temperature on the nanoimprint lithography process

Materials ScienceNanoimprint Lithography ProcessEngineeringBeam LithographyNanomaterialsNanotechnologyMicrofabricationBiophysicsApplied PhysicsStamp ShapePrinted ElectronicsNanometrologyNanofabricationMolecular Dynamics StudyMolecular DynamicsNanomechanics3D PrintingNanolithography Method