Tadamitsu Kanekiyo - Concepedia

Author

Tadamitsu Kanekiyo

Also Known As

Tadamitsu Kanekiyo

Publications

126

Citations

H-Index

Concepts

All Affiliations

Tadamitsu Kanekiyo is an author at Hitachi (Japan) specializing in microelectronics, engineering, and microfabrication.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	119
2	Applied Physics	2	2	45
3	Chemical Engineering	1	1	34
4	Chemistry	1	1	34
5	Electrical Engineering	1	1	11

Tadamitsu Kanekiyo

Publications

119

Citations

H-Index

Page 1

	Year	Citations
Effects of Mask and Necking Deformation on Bowing and Twisting in High-Aspect-Ratio Contact Hole Etching Masatoshi Miyake, Nobuyuki Negishi, Masaru Izawa, Japanese Journal of Applied Physics Incident Ion FluxIon ImplantationEngineeringElectron-beam LithographyMicrofabrication	2009	38
Bottom profile degradation mechanism in high aspect ratio feature etching based on pattern transfer observation Nobuyuki Negishi, Masatoshi Miyake, Ken’etsu Yokogawa, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena EngineeringPattern Transfer ObservationMicrofabricationMechanical EngineeringBottom Profile Degradation	2017	36
Thermal cyclic etching of silicon nitride using formation and desorption of ammonium fluorosilicate Kazunori Shinoda, Masaru Izawa, Tadamitsu Kanekiyo, Applied Physics Express Materials EngineeringMaterials ScienceChemical EngineeringRadical Exposure TimeEngineering	2016	34
A Novel Plasma Etching Tool with RF-Biased Faraday-Shield Technology: Chamber Surface Reaction Control in the Etching of Nonvolatile Materials Manabu Edamura, Ken Yoshioka, Ryoji Nishio, Japanese Journal of Applied Physics EngineeringFaraday ShieldPlasma ControllabilityPlasma ProcessingElectromagnetic Compatibility	2003	11

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