Author
Kazunori Shinoda
Also Known As
K Shinoda, K. Shinoda, Kazunori K. Shinoda, Kazunori SHINODA, Kazunori Shinoda
152
Publications
1.3K
Citations
20
H-Index
75
Concepts
All Affiliations
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 19 | 41 | 1K |
2 | Applied Physics | 14 | 16 | 459 |
3 | Chemical Engineering | 7 | 7 | 144 |
4 | Chemistry | 5 | 5 | 114 |
5 | Electrical Engineering | 4 | 4 | 76 |
Kazunori Shinoda
×
44
Publications
1.1K
Citations
20
H-Index
| Year | Citations | |
|---|---|---|
1996 | 78 | |
2007 | 77 | |
2000 | 76 | |
Atomic layer etching of silicon nitride using infrared annealing for short desorption time of ammonium fluorosilicate Nobuya Miyoshi, Hiroyuki Kobayashi, Kazunori Shinoda, Japanese Journal of Applied Physics EngineeringAtomic Layer EtchingOptoelectronic DevicesIntegrated CircuitsAmmonium Fluorosilicate | 2017 | 55 |
2011 | 44 | |
1995 | 44 | |
2004 | 40 | |
2016 | 34 | |
2019 | 33 | |
1993 | 32 |
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