Masatoshi Miyake

Effects of Mask and Necking Deformation on Bowing and Twisting in High-Aspect-Ratio Contact Hole Etching

Masatoshi Miyake, Nobuyuki Negishi, Masaru Izawa et al. · Japanese Journal of Applied Physics · 2009 · 38 citations

Incident Ion Flux, Ion Implantation, Engineering +8

Bottom profile degradation mechanism in high aspect ratio feature etching based on pattern transfer observation

Nobuyuki Negishi, Masatoshi Miyake, Ken’etsu Yokogawa et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2017 · 36 citations

Engineering, Pattern Transfer Observation, Microfabrication +8

Effects of Polarization Reversal and Surface Conditions on the Ferroelectric Electron Emission

Masatoshi Miyake, Sinji Ibuka, Koichi Yasuoka Koichi Yasuoka et al. · Japanese Journal of Applied Physics · 1997 · 23 citations

Polarization Reversal, Engineering, Electrical Properties +16

Regression Analysis of the Effect of Bias Voltage on Nano‐ and Macrotribological Properties of Diamond‐Like Carbon Films Deposited by a Filtered Cathodic Vacuum Arc Ion‐Plating Method

Shojiro Miyake, Takanori Shindo, Masatoshi Miyake · Journal of Nanomaterials · 2014 · 21 citations · Full text

Friction properties of surface-modified polished chemical-vapor-deposited diamond films under boundary lubrication with water and poly-alpha olefin

Shojiro Miyake, Takanori Shindo, Masatoshi Miyake · Tribology International · 2016 · 16 citations

Materials Science, Boundary Lubrication, Diamond-like Carbon +10