Concepedia

Author

Manabu Edamura

National Institute of Standards and Technology

Also Known As

M. Edamura, Manabu EDAMURA, Manabu Edamura, Mari Edamura

18

Publications

130

Citations

6

H-Index

34

Concepts

All Affiliations

National Institute of Standards and Technology
ME

About

Manabu Edamura is an author at National Institute of Standards and Technology specializing in engineering, electrical engineering, and applied physics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

5

5

101

2

Electrical Engineering

4

4

90

3

Applied Physics

3

3

49

4

Natural Sciences

2

2

43

5

Chemistry

1

1

11

Manabu Edamura

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5

Publications

101

Citations

5

H-Index

YearCitations

Time-resolved measurements of ion energy distributions and optical emissions in pulsed radio-frequency discharges

Yicheng Wang, Eric C. Benck, Martin Misakian,

Journal of Applied Physics

2000

32

Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas

Manabu Edamura, Eric C. Benck

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

2003

27

Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas

Manabu Edamura, Eric C. Benck

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

2004

20

Thermal radiation properties of molten salt (properties of alkali metal carbonates)

Takashi Makino, Manabu Edamura, Akihisa Kato,

Heat Transfer

1992

11

A Novel Plasma Etching Tool with RF-Biased Faraday-Shield Technology: Chamber Surface Reaction Control in the Etching of Nonvolatile Materials

Manabu Edamura, Ken Yoshioka, Ryoji Nishio,

Japanese Journal of Applied Physics

2003

11

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