Manabu Edamura

Time-resolved measurements of ion energy distributions and optical emissions in pulsed radio-frequency discharges

Yicheng Wang, Eric C. Benck, Martin Misakian et al. · Journal of Applied Physics · 2000 · 32 citations

Engineering, Glow Discharge, Mode Transition +17

Transition from E to H mode discharge in pulse-modulated inductively coupled plasmas

Manabu Edamura, Eric C. Benck · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 27 citations

Electron Density, Electrical Engineering, Langmuir Probe +15

Effects of voltage distribution along an induction coil and discharge frequency in inductively coupled plasmas

Manabu Edamura, Eric C. Benck · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 20 citations

Electron Density, Electrical Engineering, Discharge Frequency +13

Thermal radiation properties of molten salt (properties of alkali metal carbonates)

Takashi Makino, Manabu Edamura, Akihisa Kato et al. · Heat Transfer · 1992 · 11 citations

Radiative Heat Transfer, Optical Materials, Engineering +21

A Novel Plasma Etching Tool with RF-Biased Faraday-Shield Technology: Chamber Surface Reaction Control in the Etching of Nonvolatile Materials

Manabu Edamura, Ken Yoshioka, Ryoji Nishio et al. · Japanese Journal of Applied Physics · 2003 · 11 citations

Engineering, Faraday Shield, Plasma Controllability +16