Yoji Ogawa - Concepedia

Author

Yoji Ogawa

Also Known As

Yoji OGAWA, Yoji Ogawa, Yoji Ogawa Yoji Ogawa

Publications

Citations

H-Index

Concepts

All Affiliations

Yoji Ogawa is an author at Toshiba (Japan) specializing in engineering, applied physics, and electrical engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	35
2	Applied Physics	2	2	21
3	Electrical Engineering	2	2	21
4	Medicine	1	1	14
5	Computer Engineering	1	1	11

Yoji Ogawa

Publications

Citations

H-Index

Page 1

	Year	Citations
Optimization of partially coherent optical system for optical lithography Soichi Inoue, Tadahito Fujisawa, Shuichi Tamaushi, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Optical DesignOptical MaterialsEngineeringMicroscopyOptic Design	1992	14
Advanced electron-beam writing system EX-11 for next-generation mask fabrication Toru Tojo, Ryoji Yoshikawa, Yoji Ogawa, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyTarget FabricationAdvanced Electron-beamElectron Optic	1999	11
EBM-5000: electron-beam mask writer for 45-nm node H. Sunaoshi, Yuichi Tachikawa, Hitoshi Higurashi, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Electrical EngineeringElectron-beam Mask WriterNew TechnologiesEngineeringElectron Beam	2006	10

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