Statistics
Publications
3
Citations
37
H-Index
3
Active since
2005
Affiliations
University of Tokyo Hospital(Current)
Yuichi Tachikawa is an author at University of Tokyo Hospital specializing in applied physics, microfabrication, and electrical engineering.
Publications per year
2005–2016
3
3
EBM-8000: EB mask writer for product mask fabrication of 22nm half-pitch generation and beyond
Shusuke Yoshitake, Takashi Kamikubo, Noriaki Nakayamada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 10 citations
Electrical Engineering, Engineering, Electron-beam Lithography +12
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