Statistics
Publications
5
Citations
76
H-Index
5
Active since
1992
Affiliations
Toshiba (Japan)(Current)
Hitoshi Higurashi is an author at Toshiba (Japan) specializing in applied physics, engineering, and electrical engineering.
Publications per year
1992–2011
5
5
Advanced electron-beam writing system EX-11 for next-generation mask fabrication
Toru Tojo, Ryoji Yoshikawa, Yoji Ogawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 11 citations
Engineering, Electron-beam Lithography, Target Fabrication +16
EBM-8000: EB mask writer for product mask fabrication of 22nm half-pitch generation and beyond
Shusuke Yoshitake, Takashi Kamikubo, Noriaki Nakayamada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 10 citations
Electrical Engineering, Engineering, Electron-beam Lithography +12
1–5 of 5