Statistics
Publications
3
Citations
44
H-Index
3
Active since
1999
Affiliations
Toshiba (Japan)(Current)
Ryoji Yoshikawa is an author at Toshiba (Japan) specializing in applied physics, instrumentation, and engineering.
Publications per year
1999–2017
3
3
Defect Inspection Technique Using Surface Plasmon Resonance
Hiroyuki Kashiwagi, Ikuo Yoneda, Keiko Morishita et al. · Japanese Journal of Applied Physics · 2012 · 14 citations
Plasmonics, Engineering, Microscopy +13
Advanced electron-beam writing system EX-11 for next-generation mask fabrication
Toru Tojo, Ryoji Yoshikawa, Yoji Ogawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 11 citations
Engineering, Electron-beam Lithography, Target Fabrication +16
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