Ryoji Yoshikawa - Concepedia

Author

Ryoji Yoshikawa

Also Known As

Ryoji YOSHIKAWA, Ryoji Yoshikawa

Publications

Citations

H-Index

Concepts

All Affiliations

Ryoji Yoshikawa is an author at Toshiba (Japan) specializing in applied physics, instrumentation, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	44
2	Applied Physics	3	3	44
3	Education	1	1	19
4	Computer Engineering	1	1	11
5	Electrical Engineering	1	1	11

Ryoji Yoshikawa

Publications

Citations

H-Index

Page 1

	Year	Citations
Metrology and inspection required for next generation lithography Masafumi Asano, Ryoji Yoshikawa, Takashi Hirano, Japanese Journal of Applied Physics EngineeringElectron-beam LithographyMicroscopyEducationImage Placement Metrology	2017	19
Defect Inspection Technique Using Surface Plasmon Resonance Hiroyuki Kashiwagi, Ikuo Yoneda, Keiko Morishita, Japanese Journal of Applied Physics PlasmonicsEngineeringMicroscopyOptical PropertiesSpectroscopy	2012	14
Advanced electron-beam writing system EX-11 for next-generation mask fabrication Toru Tojo, Ryoji Yoshikawa, Yoji Ogawa, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyTarget FabricationAdvanced Electron-beamElectron Optic	1999	11

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