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Shuichi Tamaushi

ST

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Publications

1

Citations

14

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1

Active since

1992

Affiliations

Toshiba (Japan)(Current)

Shuichi Tamaushi is an author at Toshiba (Japan) specializing in optical systems, ophthalmology, and computational imaging.

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Publications per year

1992–1992

1

Publications

1

Optimization of partially coherent optical system for optical lithography

Soichi Inoue, Tadahito Fujisawa, Shuichi Tamaushi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 14 citations

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