Soichi Inoue

EUV actinic blank inspection: from prototype to production

Anna Tchikoulaeva, Hiroki Miyai, Tomohiro Suzuki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 38 citations

Actinic Metrology Tools, Engineering, Inspection +10

Beam induced deposition of an ultraviolet transparent silicon oxide film by focused gallium ion beam

Masataka Ogasawara, Mitsuyo Kariya, Hiroko Nakamura et al. · Applied Physics Letters · 1996 · 23 citations

Optical Materials, Engineering, Silicon Oxide +20

Development of Tool for Contamination Layer Thickness Measurement Using High Power Extreme Ultraviolet Light and in Situ Ellipsometer

Takeo Watanabe, Yukiko Kikuchi, T. Takahashi et al. · Japanese Journal of Applied Physics · 2013 · 23 citations

Ultraviolet Light, Vacuum Environment, Optical Materials +16

Automated hot-spot fixing system applied for metal layers of 65 nm logic devices

Sachiko Kobayashi, Suigen Kyoh, Toshiya Kotani et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 19 citations

Engineering, Electronic Design Automation, Computer Architecture +20

Comparison of Resist Outgassing Characterization between High Power EUV and EB

Norihiko Sugie, T. Takahashi, Kazuhiro Katayama et al. · Journal of Photopolymer Science and Technology · 2012 · 16 citations · Full text

Short Wavelength Optic, Engineering, Electron-beam Lithography +19