Toshiya Kotani

Automatic layout feature extraction for lithography hotspot detection based on deep neural network

Tetsuaki Matsunawa, Shigeki Nojima, Toshiya Kotani · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 45 citations

Convolutional Neural Network, Engineering, Machine Learning +17

A Machine Learning Based Framework for Sub-Resolution Assist Feature Generation

Xiaoqing Xu, Tetsuaki Matsunawa, Shigeki Nojima et al. · 2016 · 32 citations

Artificial Intelligence, Engineering, Machine Learning +19

Subresolution Assist Feature Generation With Supervised Data Learning

Xiaoqing Xu, Yibo Lin, Meng Li et al. · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 2017 · 28 citations

Engineering, Machine Learning, Feature Detection +19

<title>Self-aligned double and quadruple patterning layout principle</title>

Koichi Nakayama, Chikaaki Kodama, Toshiya Kotani et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 20 citations

Engineering, Computer Architecture, Pattern Transfer +16

Automated hot-spot fixing system applied for metal layers of 65 nm logic devices

Sachiko Kobayashi, Suigen Kyoh, Toshiya Kotani et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 19 citations

Engineering, Electronic Design Automation, Computer Architecture +20