Shigeki Nojima

Data Efficient Lithography Modeling With Transfer Learning and Active Data Selection

Yibo Lin, Meng Li, Yuki Watanabe et al. · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 2018 · 56 citations

Geometric Modeling, Resist Model, Model Optimization +15

Automatic layout feature extraction for lithography hotspot detection based on deep neural network

Tetsuaki Matsunawa, Shigeki Nojima, Toshiya Kotani · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 45 citations

Convolutional Neural Network, Engineering, Machine Learning +17

Self-Aligned Double and Quadruple Patterning-aware grid routing with hotspots control

Chikaaki Kodama, Koichi Nakayama, Shigeki Nojima et al. · 2013 · 39 citations

Engineering, Self-aligned Double, Smart Grid +15

Accurate lithography simulation model based on convolutional neural networks

Yuki Watanabe, Taiki Kimura, Tetsuaki Matsunawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 33 citations

Electrical Engineering, Convolutional Neural Network, Engineering +15

A Machine Learning Based Framework for Sub-Resolution Assist Feature Generation

Xiaoqing Xu, Tetsuaki Matsunawa, Shigeki Nojima et al. · 2016 · 32 citations

Artificial Intelligence, Engineering, Machine Learning +19