Tetsuaki Matsunawa

A new lithography hotspot detection framework based on AdaBoost classifier and simplified feature extraction

Tetsuaki Matsunawa, Jhih-Rong Gao, Bei Yu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 91 citations

Computing, Computer Engineering, Computer Science +17

Optical proximity correction with hierarchical Bayes model

Tetsuaki Matsunawa, Bei Yu, David Z. Pan · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 67 citations

Computing, Computer Science, Manufacturing Engineering +17

Data Efficient Lithography Modeling With Transfer Learning and Active Data Selection

Yibo Lin, Meng Li, Yuki Watanabe et al. · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 2018 · 57 citations

Computing, Computer Science, Materials Science +15

Machine learning and pattern matching in physical design

Bei Yu, David Z. Pan, Tetsuaki Matsunawa et al. · 2015 · 54 citations

Engineering, Computer Engineering, Computer Science +15

Automatic layout feature extraction for lithography hotspot detection based on deep neural network

Tetsuaki Matsunawa, Shigeki Nojima, Toshiya Kotani · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 45 citations

Computing, Computer Science, Manufacturing Engineering +14