Evolving Nano Process Infrastructure Development Center (Japan)

Statistics

Publications

119

Citations

2.3K

Authors

Location

Onagawa Chō, Japan

Also known as EIDEC · Evolving Nano Process Infrastructure Development Center · 株式会社先端ナノプロセス基盤開発センター

Evolving Nano Process Infrastructure Development Center (Japan) is a company institution in Onagawa Chō, Japan known for materials science, extreme ultraviolet lithography, and materials engineering.

Homepage ROR

Top concepts

Materials ScienceMaterials EngineeringExtreme Ultraviolet LithographyNatural SciencesEngineeringSurface ScienceElectronic MaterialsPhotonicsMicrofabricationThin Film Lithography

Publications

119

Analysis of Stochastic Effect in Line-and-Space Resist Patterns Fabricated by Extreme Ultraviolet Lithography

Takahiro Kozawa, Julius Joseph Santillan, Toshiro Itani · Applied Physics Express · 2013 · 84 citations

Engineering, Electrical Engineering, Materials Science +17

Detection of damaged urban areas using interferometric SAR coherence change with PALSAR-2

Manabu Watanabe, Rajesh Bahadur Thapa, Tsuneo Ohsumi et al. · Earth Planets and Space · 2016 · 63 citations · Full text

Natural Sciences, Earth Sciences, Geophysics +15

Relationship between Defects and Stochastic Effect in Chemically Amplified Resists Used for Extreme Ultraviolet Lithography

Takahiro Kozawa, Julius Joseph Santillan, Toshiro Itani · Japanese Journal of Applied Physics · 2013 · 58 citations

Natural Sciences, Chemistry, Materials Science +17

ISO 14001 and the Reduction of Toxic Emissions

M. Szymański, Piyush Tiwari · The Journal of Policy Reform · 2004 · 48 citations

Management, Environmental Management, Environmental Policy +8

Feasibility study of sub-10-nm half-pitch fabrication by chemically amplified resist processes of extreme ultraviolet lithography: I. Latent image quality predicted by probability density model

Takahiro Kozawa, Julius Joseph Santillan, Toshiro Itani · Japanese Journal of Applied Physics · 2014 · 24 citations

Engineering, Electrical Engineering, Materials Science +14

1–5 of 119

Authors

TT
Toru Tsuchihashi
Evolving Nano Process Infrastructure Development Center (Japan), Japan
14 publications · 82 citations
7
h-index
TN
T. Nagai
Evolving Nano Process Infrastructure Development Center (Japan), Japan
14 publications · 84 citations
6
h-index

1–2 of 2