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Evolving Nano Process Infrastructure Development Center (Japan)

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113

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2.1K

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Onagawa Chō, Japan

Also known as EIDEC · 株式会社先端ナノプロセス基盤開発センター

Evolving Nano Process Infrastructure Development Center (Japan) is a company institution in Onagawa Chō, Japan known for engineering, materials science, and applied physics.

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Publications

113

Analysis of Stochastic Effect in Line-and-Space Resist Patterns Fabricated by Extreme Ultraviolet Lithography

Takahiro Kozawa, Julius Joseph Santillan, Toshiro Itani · Applied Physics Express · 2013 · 84 citations

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Detection of damaged urban areas using interferometric SAR coherence change with PALSAR-2

Manabu Watanabe, Rajesh Bahadur Thapa, Tsuneo Ohsumi et al. · Earth Planets and Space · 2016 · 63 citations · Full text

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Relationship between Defects and Stochastic Effect in Chemically Amplified Resists Used for Extreme Ultraviolet Lithography

Takahiro Kozawa, Julius Joseph Santillan, Toshiro Itani · Japanese Journal of Applied Physics · 2013 · 57 citations

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ISO 14001 and the Reduction of Toxic Emissions

M. Szymański, Piyush Tiwari · The Journal of Policy Reform · 2004 · 48 citations

Feasibility study of sub-10-nm half-pitch fabrication by chemically amplified resist processes of extreme ultraviolet lithography: I. Latent image quality predicted by probability density model

Takahiro Kozawa, Julius Joseph Santillan, Toshiro Itani · Japanese Journal of Applied Physics · 2014 · 24 citations

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1–5 of 113

Authors

1

  1. TT
    Toru Tsuchihashi

    Evolving Nano Process Infrastructure Development Center (Japan), Japan

    13 publications · 79 citations

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