Concepedia

Toru Tsuchihashi

TT

Statistics

Publications

3

Citations

36

H-Index

3

Active since

2015

Affiliations

Evolving Nano Process Infrastructure Development Center (Japan)(Current)

Toru Tsuchihashi is an author at Evolving Nano Process Infrastructure Development Center (Japan) specializing in materials science, natural sciences, and materials engineering.

Publications per year

2015–2016

3

Publications

3

Recent Progress of Negative-tone Imaging Process and Materials with EUV Exposure

Toru Fujimori, Toru Tsuchihashi, Toshiro Itani · Journal of Photopolymer Science and Technology · 2015 · 13 citations · Full text

, , +10

Novel ultra-high sensitive 'metal resist' for EUV lithography

Toru Fujimori, Toru Tsuchihashi, Shinya Minegishi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 12 citations

, , +8

Negative-tone Imaging with EUV Exposure

Hideaki Tsubaki, Wataru Nihashi, Toru Tsuchihashi et al. · Journal of Photopolymer Science and Technology · 2015 · 11 citations · Full text

, , +13

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