Concepedia
Statistics
Publications
5
Citations
127
H-Index
Active since
1978
Affiliations
Intel (United States)(Current)
Purdue University West Lafayette
Fu-Chang Lo is an author at Intel (United States) specializing in materials science, engineering, and semiconductor devices.
Publications per year
1978–2002
Progress in extreme ultraviolet mask repair using a focused ion beam
Ted Liang, Alan R. Stivers, Richard H. Livengood et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 56 citations
Engineering, Materials Engineering, Materials Science +15
EUV mask absorber characterization and selection
Pei-yang Yan, Guojing Zhang, Patrick Kofron et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 24 citations
Natural Sciences, Materials Engineering, Materials Science +17
Monolithic (ZnO) Sezawa-mode <i>p</i> <i>n</i>-diode-array memory correlator
Fu-Chang Lo, R. L. Gunshor, R.F. Pierret · Applied Physics Letters · 1979 · 23 citations · Full text
Engineering, Electrical Engineering, Materials Science +17
Lithography strategy for 65-nm node
Yan Borodovsky, Richard E. Schenker, Gary Allen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 13 citations
Engineering, Electrical Engineering, Manufacturing Engineering +9
Separation of storage effects in monolithic <i>p</i> <i>n</i> diode correlators
Fu-Chang Lo, R. L. Gunshor, R.F. Pierret et al. · Applied Physics Letters · 1978 · 11 citations
Engineering, Electrical Engineering, Materials Science +12
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