Richard E. Schenker

3-D Self-aligned Stacked NMOS-on-PMOS Nanoribbon Transistors for Continued Moore’s Law Scaling

ChingYao Huang, G. Dewey, Ehren Mannebach et al. · 2020 · 115 citations

Engineering, Computer Engineering, Electrical Engineering +15

30 nm physical gate length CMOS transistors with 1.0 ps n-MOS and 1.7 ps p-MOS gate delays

R. Chau, J. Kavalieros, B. Roberds et al. · 2002 · 110 citations

Engineering, Electrical Engineering, Microelectronics +16

Ultraviolet-induced densification in fused silica

Richard E. Schenker, W.G. Oldham · Journal of Applied Physics · 1997 · 90 citations

Natural Sciences, Materials Engineering, Materials Science +17

Demonstration of a Stacked CMOS Inverter at 60nm Gate Pitch with Power Via and Direct Backside Device Contacts

M. Radosavljević, ChingYao Huang, Rohit Galatage et al. · 2023 · 32 citations

Engineering, Electrical Engineering, Electronic Materials +15

Pixelated phase mask as novel lithography RET

Yan Borodovsky, Wenhao Cheng, Richard E. Schenker et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 27 citations

Engineering, Computer Engineering, Electrical Engineering +16