Concepedia

Yan Borodovsky

YB

7

Publications

137

Citations

7

H-Index

1995

Active since

Affiliations

Intel (United States)(Current)

Yan Borodovsky is an author at Intel (United States) specializing in engineering, computer engineering, and microelectronics.

Top concepts

EngineeringMicroelectronicsComputer EngineeringMicrofabricationApplied PhysicsElectronic PackagingTechnology3D PrintingMaterial ScienceComputational Imaging

Publications per year

1995–2008

7

Publications

7

Marching to the beat of Moore's Law

Yan Borodovsky · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 33 citations

Engineering, Industrial Engineering, Computer Architecture +18

Pixelated phase mask as novel lithography RET

Yan Borodovsky, Wenhao Cheng, Richard E. Schenker et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 27 citations

Electrical Engineering, Wafer Scale Processing, Engineering +13

Making a trillion pixels dance

Vivek K. Singh, Bin Hu, Kenny K. Toh et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 23 citations

Pixelated Mask, Image Analysis, Engineering +13

<title>Impact of local partial coherence variations on exposure tool performance</title>

Yan Borodovsky · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 20 citations

'Coherence Map, Kinesiology, Engineering +10

Lithography strategy for 65-nm node

Yan Borodovsky, Richard E. Schenker, Gary Allen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 13 citations

Materials Science, Engineering, Beam Lithography +14

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