D.S. Bang

Resistivity of boron and phosphorus doped polycrystalline Si1−<i>x</i>Ge<i>x</i> films

D.S. Bang, Min Cao, Albert Wang et al. · Applied Physics Letters · 1995 · 47 citations

Engineering, Materials Engineering, Materials Science +17

Plasma doping for shallow junctions

Matthew Goeckner, Susan B. Felch, Ziwei Fang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 28 citations

Engineering, Electrical Engineering, Physics +17

Profile simulation of conformality of chemical vapor deposited copper in subquarter-micron trench and via structures

Aaron R. Burke, G. Braeckelmann, D. Manger et al. · Journal of Applied Physics · 1997 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +16

Time dependent dielectric wearout (TDDW) technique for reliability of ultrathin gate oxides

Yider Wu, Qian Xiang, D.S. Bang et al. · IEEE Electron Device Letters · 1999 · 16 citations

Engineering, Electrical Engineering, Materials Science +17

Pathfinding for 22nm CMOS designs using Predictive Technology Models

Xia Li, Wei Zhao, Yu Cao et al. · 2009 · 15 citations

Engineering, Computer Engineering, Electrical Engineering +14