G. Braeckelmann

Statistics

Publications

Citations

H-Index

Active since

1995

Affiliations

University at Albany, State University of New York(Current)

MKS Instruments (United States)

G. Braeckelmann is an author at University at Albany, State University of New York specializing in chemical vapor deposition, materials engineering, and natural sciences.

Publications per year

1995–1997

Publications

Chemical vapor deposition of copper from CuI hexafluoroacetylacetonate trimethylvinylsilane for ultralarge scale integration applications

G. Braeckelmann, D. Manger, Aaron R. Burke et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 29 citations

Natural Sciences, Materials Engineering, Materials Science +17

Profile simulation of conformality of chemical vapor deposited copper in subquarter-micron trench and via structures

Aaron R. Burke, G. Braeckelmann, D. Manger et al. · Journal of Applied Physics · 1997 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +16

In Situ Mass Spectral and Infrared Studies of the Gas‐Phase Evolution and Decomposition Pathways of Cu II ( hfac ) 2 : Application in the Development of Plasma‐Assisted Chemical Vapor Deposition of Copper

Zheng Bo, G. Braeckelmann, Kelly Kujawski et al. · Journal of The Electrochemical Society · 1995 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +16

1–3 of 3