Pedro Herrera

Near-Infrared Spectroscopy and Spectral Mapping of Jupiter and the Galilean Satellites: Results from Galileo's Initial Orbit

R. W. Carlson, W. D. Smythe, K. H. Baines et al. · Science · 1996 · 171 citations

Photometry, Exoplanet Atmosphere, Outer Planet +11

Correlating scatterometry to CD-SEM and electrical gate measurements at the 90-nm node using TMU analysis

Matthew Sendelbach, Charles N. Archie, Bill Banke et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 21 citations

Engineering, Measurement, In-line Metrology +16

Use of multiple azimuthal angles to enable advanced scatterometry applications

Matthew Sendelbach, Alok Vaid, Pedro Herrera et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 19 citations

Optical Materials, Engineering, Optical Testing +24

Enabling Scatterometry as an In-Line Measurement Technique for 32 nm BEOL Application

M. Golam Faruk, S. Zangooie, M. Angyal et al. · IEEE Transactions on Semiconductor Manufacturing · 2011 · 16 citations

Engineering, Electron-beam Lithography, Measurement +25

Spectral scatterometry for 2D trench metrology of low-K dual-damascene interconnect

Vladimir A. Ukraintsev, Mak Kulkarni, Christopher C. Baum et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 12 citations

Engineering, Microscopy, Optical Testing +18