Concepedia

Mak Kulkarni

MK

1

Publications

12

Citations

1

H-Index

2002

Active since

Affiliations

KLA (United States)(Current)

Mak Kulkarni is an author at KLA (United States) specializing in applied physics, natural sciences, and instrumentation.

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Publications per year

2002–2002

1

Publications

1

Spectral scatterometry for 2D trench metrology of low-K dual-damascene interconnect

Vladimir A. Ukraintsev, Mak Kulkarni, Christopher C. Baum et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 12 citations

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