Concepedia

Author

Mak Kulkarni

KLA (United States)

Also Known As

Mak Kulkarni

6

Publications

24

Citations

3

H-Index

11

Concepts

All Affiliations

KLA (United States)
MK

About

Mak Kulkarni is an author at KLA (United States) specializing in applied physics, natural sciences, and instrumentation.

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#ConceptH-IndexPublicationsCitations

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Engineering

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Natural Sciences

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Applied Physics

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Materials Science

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Physics

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Mak Kulkarni

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1

Publications

12

Citations

1

H-Index

YearCitations

Spectral scatterometry for 2D trench metrology of low-K dual-damascene interconnect

Vladimir A. Ukraintsev, Mak Kulkarni, Christopher C. Baum,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2002

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