Statistics
Publications
2
Citations
34
H-Index
2
Active since
2002
Affiliations
Texas Instruments (United States)(Current)
Christopher C. Baum is an author at Texas Instruments (United States) specializing in atomic force microscopy metrology, surface metrology, and semiconductor devices.
Publications per year
2002–2005
2
2
The role of AFM in semiconductor technology development: the 65 nm technology node and beyond
Vladimir A. Ukraintsev, Christopher C. Baum, Gary Zhang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 22 citations
Engineering, Electrical Engineering, Manufacturing Engineering +17
Spectral scatterometry for 2D trench metrology of low-K dual-damascene interconnect
Vladimir A. Ukraintsev, Mak Kulkarni, Christopher C. Baum et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 12 citations
Natural Sciences, Materials Engineering, Materials Science +17
1–2 of 2