Bill Banke

Feedforward of mask open measurements on an integrated scatterometer to improve gate linewidth control

Matthew Sendelbach, W. Natzle, Charles N. Archie et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 29 citations

Electrical Engineering, Wafer Scale Processing, Engineering +15

Correlating scatterometry to CD-SEM and electrical gate measurements at the 90-nm node using TMU analysis

Matthew Sendelbach, Charles N. Archie, Bill Banke et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 21 citations

Engineering, Measurement, In-line Metrology +16

Reducing measurement uncertainty drives the use of multiple technologies for supporting metrology

Bill Banke, Charles N. Archie, Matthew Sendelbach et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 18 citations

Measurement Theory, Engineering, Measurement +23

New comprehensive metrics and methodology for metrology tool fleet matching

Eric Solecky, Chas Archie, Bill Banke · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 16 citations

Transport Network Analysis, Engineering, Measurement +28

Impact of sampling on uncertainty: semiconductor dimensional metrology applications

Benjamin Bunday, Bart Rijpers, Bill Banke et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 16 citations

Engineering, Metrology Specifications, Measurement +20