Concepedia

Chas Archie

CA

7

Publications

145

Citations

7

H-Index

1993

Active since

Affiliations

IBM (United States)(Current)

Nova Measuring Instruments (Israel)

Nova Measuring Instruments (United States)

GlobalFoundries (United States)

Toshiba (Japan)

Chas Archie is an author at IBM (United States) specializing in instrumentation, engineering, and calibration.

Top concepts

Publications per year

1993–2014

7

Publications

7

A holistic metrology approach: hybrid metrology utilizing scatterometry, CD-AFM, and CD-SEM

Alok Vaid, Bin Bin Yan, Yun Tao Jiang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 65 citations

, , +19

New comprehensive metrics and methodology for metrology tool fleet matching

Eric Solecky, Chas Archie, Bill Banke · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 16 citations

, , +28

Impact of sampling on uncertainty: semiconductor dimensional metrology applications

Benjamin Bunday, Bart Rijpers, Bill Banke et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 16 citations

, , +20

The measurement uncertainty challenge of advanced patterning development

Narender Rana, Chas Archie, Wei Lü et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 13 citations · Full text

Hybrid reference metrology exploiting patterning simulation

Narender Rana, Chas Archie · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 13 citations

, , +28

Rows per page

1–5 of 7