Paul Graeupner

High-NA EUV lithography exposure tool: program progress

Jan van Schoot, Eelco van Setten, Kars Troost et al. · 2020 · 58 citations

Engineering, Electron-beam Lithography, Microscopy +24

High NA EUV lithography: Next step in EUV imaging

Eelco van Setten, Gerardo Bottiglieri, John McNamara et al. · 2019 · 54 citations

High-NA EUV lithography exposure tool: advantages and program progress

Jan van Schoot, Sjoerd Lok, Eelco van Setten et al. · 2020 · 44 citations

Impact of wavefront errors on low k1 processes at extremely high NA

Paul Graeupner, Reiner Garreis, Aksel Goehnermeier et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 29 citations

Engineering, Microscopy, Optic Design +19

EUV optics: status, outlook and future

Paul Graeupner, Peter Kuerz, Thomas Stammler et al. · 2022 · 25 citations

Engineering, Electron-beam Lithography, Optic Design +18