Gerardo Bottiglieri

High NA EUV lithography: Next step in EUV imaging

Eelco van Setten, Gerardo Bottiglieri, John McNamara et al. · 2019 · 54 citations

3D mask effects in high NA EUV imaging

Andreas Erdmann, Peter Evanschitzky, Gerardo Bottiglieri et al. · 2019 · 26 citations

Image Formation, Engineering, High Resolution +15

Edge placement error control and Mask3D effects in High-NA anamorphic EUV lithography

Eelco van Setten, Gerardo Bottiglieri, Laurens de Winter et al. · 2017 · 25 citations

EUV High-NA scanner and mask optimization for sub 8 nm resolution

Jan van Schoot, Koen van Ingen Schenau, Gerardo Bottiglieri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 20 citations

High Resolution, Engineering, Microscopy +22

Imaging performance of the EUV high NA anamorphic system

Koen van Ingen Schenau, Gerardo Bottiglieri, Jan van Schoot et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 17 citations