Concepedia

Aksel Goehnermeier

AG

2

Publications

46

Citations

2

H-Index

2003

Active since

Affiliations

Carl Zeiss (Germany)(Current)

Aksel Goehnermeier is an author at Carl Zeiss (Germany) specializing in optical systems, optical properties, and applied physics.

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Publications per year

2003–2007

2

Publications

2

Impact of wavefront errors on low k1 processes at extremely high NA

Paul Graeupner, Reiner Garreis, Aksel Goehnermeier et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 29 citations

, , +19

Modeling polarization for hyper-NA lithography tools and masks

Kafai Lai, Alan E. Rosenbluth, Geng Han et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 17 citations

, , +21

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