Concepedia

Author

Q. Leonard

University of Wisconsin–Madison

Also Known As

Q. J. Leonard, Q. Leonard, Quinn J. Leonard, Quinn Leonard

29

Publications

206

Citations

9

H-Index

34

Concepts

All Affiliations

University of Wisconsin–MadisonArgonne National LaboratoryPhoton Imaging (United States)
QL

About

Q. Leonard is an author at University of Wisconsin–Madison specializing in engineering, applied physics, and microfabrication.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

85

2

Applied Physics

5

5

64

3

Health Sciences

1

1

16

4

Chemical Engineering

1

1

21

5

Electrical Engineering

1

1

12

Q. Leonard

×

8

Publications

149

Citations

8

H-Index

YearCitations

Demagnification in proximity x-ray lithography and extensibility to 25 nm by optimizing Fresnel diffraction

Yuli Vladimirsky, A. J. Bourdillon, Olga Vladimirsky,

Journal of Physics D Applied Physics

1999

54

A novel EUV exposure station for nanotechnology studies

John Wallace, Yangchun Cheng, Artak Isoyan,

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment

2007

21

Experimental and theoretical study of image bias in x-ray lithography

Jerry Z. Y. Guo, Q. Leonard, F. Cerrina,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1992

16

Progress in the fabrication of high-aspect-ratio zone plates by soft x-ray lithography

Ralu Divan, Derrick C. Mancini, Nicolai A. Moldovan,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2002

14

Metrology of high-resolution resist structures on insulating substrates

Enzo Di Fabrizio, L. Grella, L. Luciani,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1993

12

3D microstructures fabricated by partially opaque X-ray lithography masks

Stefano Cabrini, M. Gentili, Enzo Di Fabrizio,

Microelectronic Engineering

2000

11

Dense arrays of nanopores as x-ray lithography masks

S. A. Knaack, J. Eddington, Q. Leonard,

Applied Physics Letters

2004

11

Design and fabrication of Fresnel zone plates with large numbers of zones

Z. Chen, Y. Vladimirsky, Matthew S. Brown,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1997

10

Page 1