Concepedia

Olga Vladimirsky

OV

Statistics

Publications

10

Citations

172

H-Index

10

Active since

1988

Affiliations

IBM (United States)(Current)

Louisiana State University

University of Wisconsin–Madison

IBM Research - Thomas J. Watson Research Center

Olga Vladimirsky is an author at IBM (United States) specializing in engineering, materials science, and x-ray lithography.

Publications per year

1988–2008

10

Publications

10

Demagnification in proximity x-ray lithography and extensibility to 25 nm by optimizing Fresnel diffraction

Yuli Vladimirsky, A. J. Bourdillon, Olga Vladimirsky et al. · Journal of Physics D Applied Physics · 1999 · 55 citations

Engineering, Manufacturing Engineering, Materials Science +12

Thermal effects in x-ray masks during synchrotron storage ring irradiation

Yuli Vladimirsky, José R. Maldonado, R. Fair et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 24 citations

Engineering, Materials Engineering, Materials Science +15

PMMA as an X-ray resist for micro-machining application: Latent image formation and thickness losses

Yuli Vladimirsky, Olga Vladimirsky, Kevin J. Morris et al. · Microelectronic Engineering · 1996 · 16 citations

Engineering, Manufacturing Engineering, Materials Science +9

Fully scaled 0.5 μm metal–oxide semiconductor circuits by synchrotron x-ray lithography: Mask fabrication and characterization

R. Viswanathan, R. E. Acosta, David E. Seeger et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 15 citations

Engineering, Electrical Engineering, Materials Science +15

SLM device for 193 nm lithographic applications

John Lauria, Ronald Albright, Olga Vladimirsky et al. · Microelectronic Engineering · 2008 · 12 citations

Engineering, Electrical Engineering, Materials Science +8

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