Concepedia

R. Fair

RF

4

Publications

71

Citations

4

H-Index

1989

Active since

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

R. Fair is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, radiology, and health sciences.

Top concepts

RadiologyEngineeringHealthMicroscopyX-ray ImagingApplied PhysicsPhysicsMedicineCalibrationCollimation

Publications per year

1989–2004

4

Publications

4

New paradigm in lens metrology for lithographic scanner: evaluation and exploration

Kafai Lai, Gregg M. Gallatin, Mark van de Kerkhof et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 24 citations

Engineering, Microscopy, Optic Design +23

Thermal effects in x-ray masks during synchrotron storage ring irradiation

Yuli Vladimirsky, José R. Maldonado, R. Fair et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 24 citations

Experimental Results, Engineering, Health Sciences +15

Control of fixturing-induced distortion in x-ray masks

A.D. Wilson, Cameron Lapadula, J. P. Silverman et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 12 citations

Electron-beam Lithography, Health Sciences, Medical Imaging +11

Fabrication of 64-Mb DRAM using x-ray lithography

Ronald DellaGuardia, C. Wasik, Denise M. Puisto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 11 citations

Engineering, Electron-beam Lithography, Microscopy +16

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