Concepedia

Denise M. Puisto

DM

2

Publications

22

Citations

2

H-Index

1994

Active since

Affiliations

IBM (United States)(Current)

Denise M. Puisto is an author at IBM (United States) specializing in applied physics, microelectronics, and microscopy.

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Publications per year

1994–1995

2

Publications

2

Overlay enhancement with product-specific emulation in electron-beam lithography tools

Denise M. Puisto, M. A. Sturans, Mark Lawliss · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 11 citations

, , +22

Fabrication of 64-Mb DRAM using x-ray lithography

Ronald DellaGuardia, C. Wasik, Denise M. Puisto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 11 citations

, , +16

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