Concepedia

C. Wasik

CW

2

Publications

21

Citations

2

H-Index

1989

Active since

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

C. Wasik is an author at IBM Research - Thomas J. Watson Research Center specializing in microfabrication, electrical engineering, and engineering.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMicrofabricationElectrical EngineeringVlsiMicroscopyMicrostructureOptoelectronicsMaterial Science

Publications per year

1989–1995

2

Publications

2

Fabrication of 64-Mb DRAM using x-ray lithography

Ronald DellaGuardia, C. Wasik, Denise M. Puisto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 11 citations

Engineering, Electron-beam Lithography, Microscopy +16

Application of synchrotron x-ray lithography to fabricate fully scaled 0.5 μm complementary metal–oxide semiconductor devices and circuits

L. K. Wang, J. P. Silverman, David E. Seeger et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 10 citations

Engineering, Electron-beam Lithography, Optoelectronic Devices +16

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