Concepedia

L. K. Wang

LK

2

Publications

30

Citations

2

H-Index

1988

Active since

Affiliations

IBM (United States)(Current)

IBM Research - Thomas J. Watson Research Center

L. K. Wang is an author at IBM (United States) specializing in electrical engineering, integrated circuits, and optoelectronic devices.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsIntegrated CircuitsElectrical EngineeringOptoelectronic DevicesVlsiThin FilmsMicrofabrication

Publications per year

1988–1989

2

Publications

2

Fabrication of fully scaled 0.5-μm <i>n</i>-type metal–oxide semiconductor test devices using synchrotron x-ray lithography: Overlay, resist processes, and device fabrication

J. P. Silverman, V. Dimilia, D. Katcoff et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 20 citations

Engineering, Resist Processes, Electron-beam Lithography +21

Application of synchrotron x-ray lithography to fabricate fully scaled 0.5 μm complementary metal–oxide semiconductor devices and circuits

L. K. Wang, J. P. Silverman, David E. Seeger et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 10 citations

Engineering, Electron-beam Lithography, Optoelectronic Devices +16

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