J. P. Silverman

Degradation of poly(methylmethacrylate) by deep ultraviolet, x-ray, electron beam, and proton beam irradiations

Jin O. Choi, James A. Moore, J. C. Corelli et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 142 citations

Ultraviolet Light, Engineering, Main Chain Scission +23

Elastic Constants of Cadmium from 4.2°K to 300°K

C. W. Garland, J. P. Silverman · Physical Review · 1960 · 105 citations

Materials Science, Elastic Constants, Engineering +15

X-ray lithography: Status, challenges, and outlook for 0.13 μm

J. P. Silverman · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 99 citations

Optical Materials, Xrl Technology, Engineering +18

Challenges and progress in x-ray lithography

J. P. Silverman · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 68 citations

Engineering, Electron-beam Lithography, Integrated Circuit Manufacturing +17

Demonstration of highly scaled FinFET SRAM cells with high-κ/metal gate and investigation of characteristic variability for the 32 nm node and beyond

Hikaru Kawasaki, Marwan Khater, Michael Guillorn et al. · 2008 · 61 citations

Electrical Engineering, Engineering, Crystalline Defects +15