Microelectronic Engineering · 2008 · 12 citations · 1 references
EngineeringElectrical EngineeringMaterials ScienceOpticsPhotonicsSemiconductor DevicesDevice CharacterizationMask FabricationThin Film LithographyDevice FabricationOptical Lithography
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Highly reliable and extremely stable SiGe micro-mirrors
Maria Gromova, P. A. Muller, T. Lauwagie et al. · 2007 · 17 citations